| Model |
IM-8030T |
| Image sensor |
1" 20-megapixel monochrome CMOS |
| Display |
12.1" LCD monitor (WXGA: 1280 × 800) |
| Receiver lens |
Double telecentric lens |
| Image measurement |
Field of view |
Wide-field measurement mode |
300 × 200 mm (4× R50) |
| High-precision measurement mode |
225 × 125 mm |
| Minimum display unit |
0.1 μm |
| Repeatability |
Wide-field measurement mode |
Without stage movement |
±1 µm |
| With stage movement |
±2 µm |
| High-precision measurement mode |
Without stage movement |
±0.5 µm |
| With stage movement |
±1.5 µm |
| Measurement accuracy (±2σ) |
Wide-field measurement mode |
Without binding |
±3.9 µm *1 |
| With binding |
±（7+0.02L）µm *2 |
| High-precision measurement mode |
Without binding |
±2 µm *3 |
| With binding |
±（4+0.02L）µm *4 |
| Outer diameter measurement |
Measurement accuracy |
Wide-field measurement mode |
±（2.8+0.02D）µm *5 |
| High-precision measurement mode |
±（1.4+0.04D）µm *6 |
| Light probe measurement |
Measurable area (XY) |
190 × 90 mm |
| Maximum measurement depth |
30 mm |
| Light probe diameter |
ø3 mm |
| Measuring force |
0.015 N |
| Repeatability |
±2 μm *7 |
| Measurement accuracy |
±(8 + 0.02 L) μm *8 |
